Details

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The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10^-9 mbar to atmosphere (3.8 x 10^-9 Torr to atmosphere). 

Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.

 

Advantages

• Combination gauge – Inverted Magnetron & Pirani
• Wide measurement range from 5 x 10^-9 mbar to atmosphere
• No filament to burn out
• Excellent ignition properties
• Easy to clean
• FPM or metal-sealed feedthrough
• LED indicator for high voltage on
• Logarithmic analog output signal

Typical applications

• High vacuum pressure monitoring
• Base pressure for evaporation and sputtering systems
• General vacuum measurement and control in the medium and high vacuum range

 

Specifications

Measurement range (air, N2)	mbar Torr	5 x 10-9 … 1000 3.8 x 10-9 … 760
Accuracy
1 x 10-8 … 100 mbar	% of reading	≈±30%
Repeatability
1 x 10-8 … 100 mbar	% of reading	≈±5%
Temperature
Operation (ambient)	°C	+5 … +55
Storage	°C	–40 … +65
Bake-out (1)	°C	150
Supply voltage
At gauge	V (dc)	+15 … +30
At supply unit with max. cable length (2)	V (dc)	+16 … +30
Ripple	V (p-p)	≤1
Power consumption	W	≤2
Materials exposed to vacuum		stainless steel, Al2O3, FPM75, Mo, Ni, Au, W
(1) Without electronics and magnetic shielding. (2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.