Details

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The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in themarketplace. 

The rugged stainless steel sensor cell and compact design qualifythem for use on semiconductor systems and for standard applications, such as fore vacuum lines.

 

Advantages

• Easy push button ATM and HV adjustment
• Space saving rugged design
• Aluminum housing
• Mounts in any orientation
• Stainless steel measuring cell with metal-sealed feedthrough
• Logarithmic signal output for easy integration
• 10 bar absolute overpressure with threaded connections
• 250 °C bakeable version
• Nickel filament option for corrosive applications
• Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
• Optional setpoints
• RoHS compliance

Typical applications

•  Fore vacuum pressure measurement
•  Safety circuits in vacuum systems
•  General vacuum measurement and control from low to the high vacuum range

 

Specifications

Measurement range	V	+1.9 … +10.0
Accuracy(N2)
1 x 10-3 … 100 mbar	% of reading	±15%
5 x 10-4 … 1 x 10-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%
Repeatability (air)
1 x 10-3 … 100 mbar	% of reading	2%
Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 (2)
Storage	°C	-20 … +65
Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1
Power consumption	W	≤1
Setpoint
Number of setpoints	Number of setpoints	none
Setting range	mbar	‒
Hysteresis	% of reading	‒
Relay contact		‒
Relay contact: Switching time	ms	‒
Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435