Details

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The “Dry” Standard for Vacuum Leak Testing in Industrial Vacuum and Semiconductor Manufacturing 

The INFICON UL1000 Fab Helium Leak Detector is the renowned standard when it comes to economic helium vacuum leak testing in industrial or semiconductor environments.

Potential contamination of the tested parts or equipment by carbon-hydrogen compounds or particles is eliminated through the instrument’s dry pump technology. The UL1000 Fab provides the best compromise between high performance, unparalleled robustness, and affordability. It provides state-of-the art detection limits of 10^-12 mbar*l/s combined with reasonable short pump down and response time. The compact design provides high maneuverability allowing easy access to maintenance areas with restricted space. The selectable background suppression (iZERO) enables continuous leak testing within at least two decades lower than existing background levels. 

All features enable you to shorten the time of your leak testing efforts while assuring that all leaks can be identified at an economic scale.

Advantages

• minimize leak testing efforts through quick pump down and response time
• avoid need for multiple leak tests by using selectable background suppression (iZERO)
• enable easy access to maintenance areas with restricted space through maneuverable design
• low total cost of ownership (TCO) enabled by robust two hot filament ion source (3 years warranty) and counterflow vacuum system
• easy to use with rotatable display, optical and audible leak indication, and optional remote control
• low maintenance via a built-in test leak with auto calibration procedure

Typical Applications

• industrial vacuum equipment manufacturing with high demand for cleanliness
• vacuum components or sub-assemblies before they are installed in existing tools
• maintenance work on vacuum tools, with or without support from their own pump
• inspections and installations of process gas systems
• Semiconductor, flat panel display or solar cell manufacturing

Specifications

Min. detectable leak rate for Helium (Vacuum mode)	mbar•L/s	< 5 • 10-12
Min. detectable leak rate for Helium (Sniffer mode)	mbar•L/s	< 5·10-8
Max. Inlet pressure GROSS mode	mbar	15
Max. Inlet pressure FINE mode	mbar	2
Max. Inlet pressure ULTRA mode	mbar	0.4
Pumping speed during evacuation	m³/h	25 at 50 Hz
Helium pumping speed ULTRA mode	L/s	2.5
Detectable masses		2,3,4 amu
Mass spectrometer Sector field		180°
Filaments ion source Iridium/Yttria coated		2
Calibrated built-in leak	mbar•L/s	∼ 10-7
Test port	DN 25 KF	1
Adjustable triggers		2
Interface		RS 232
Chart recorder output	V	2 x10
In/Outputs		PLC compatible
Permissable ambient temperature (during operation)	°C	+10 to +40
Weight	kg lb	110 242
Dimensions (l x w x h)	mm in.	1050 x 472 x 987 41 x 19 x 39
Supply voltage (EU)	V (ac)	230 (± 10 %) 50 Hz
Supply voltage (US)	V (ac)	100/115 V (± 10 %) 50/60 Hz
Power consumption (typ.)	VA	1100
Power consumption (max.)	VA	1100